Proceedings of the 2017 Spring Topical Meeting on Precision Engineering and Optics: What are the Limits of Precision, and How to Characterize Them?
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Proceedings of the 2017 Spring Topical Meeting on Precision Engineering and Optics: What are the Limits of Precision, and How to Characterize Them?
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| Preview | Authors / Editors | Title | Type | Issue Date | |
|---|---|---|---|---|---|
| 1 | Riel, Thomas ; Galffy, Andras ; Sinn, Andreas ; Schitter, Georg | Improvement of the angular precision of an optical metrology platform by disturbance compensation | Konferenzbeitrag Inproceedings | 2017 |