Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII
	
	
Book title Buchtitel
	
	
	
	
		
		
		
			
			
			
			
			
			
				
			
			
			
				
			
			
			
			
			
				Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII
			
						
			
		
		
		
		
	
		
	
	
	
	
		
	
	
	
	
	
	
Publisher Herausgeber
	
	
	
	
		
		
		
			
			
			
			
			
			
				
			
			
			
				
			
			
			
			
			
				SPIE
			
						
			
		
		
		
		
	
		
	
	
	
	
		
	
	
	
	
	
	
Series Schriftenreihe
	
	
	
	
		
		
		
			
			
			
			
			
			
				
			
			
			
				
			
			
			
			
			
				Proceedings of SPIE - International Society for Optical Engineering
			
						
			
		
		
		
		
	
		
	
	
	
	
		
	
	
	
	
Results 1-4 of 4 (Search time: 0.002 seconds).
| Preview | Authors / Editors | Title | Type | Issue Date | |
|---|---|---|---|---|---|
| 1 | Toledo, Javier ; Ruiz-Díez, V. ; Pfusterschmied, Georg ; Schmid, Ulrich | Characterization of oscillator circuits for monitoring the density-viscosity of liquids by means of piezoelectric MEMS microresonators | Konferenzbeitrag Inproceedings | 2017 | |
| 2 | Kiziroglou, M. E. ; Becker, Thomas ; Yeatman, E. M. ; Schmid, Ulrich ; Evans, J. | Comparison of methods for static charge energy harvesting on aircraft | Konferenzbeitrag Inproceedings | 2017 | |
| 3 | Ruiz-Díez, V. ; Toledo, Javier ; Hernando-Garcia, J. ; Pfusterschmied, Georg ; Schmid, Ulrich | Fluid-structure interaction modelling of the roof tile-shaped modes in piezoelectric plate microresonators | Konferenzbeitrag Inproceedings | 2017 | |
| 4 | Frischmuth, Tobias ; Schneider, Michael ; Grille, Thomas ; Schmid, Ulrich | FT-IR analysis of high temperature annealing effects in a-SiC:H thin films | Konferenzbeitrag Inproceedings | 2017 | 
