Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII
Book title Buchtitel
Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII
Publisher Herausgeber
SPIE
Series Schriftenreihe
Proceedings of SPIE - International Society for Optical Engineering
Results 1-4 of 4 (Search time: 0.002 seconds).
Preview | Authors / Editors | Title | Type | Issue Date | |
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1 | Toledo, Javier ; Ruiz-Díez, V. ; Pfusterschmied, Georg ; Schmid, Ulrich | Characterization of oscillator circuits for monitoring the density-viscosity of liquids by means of piezoelectric MEMS microresonators | Konferenzbeitrag Inproceedings | 2017 | |
2 | Kiziroglou, M. E. ; Becker, Thomas ; Yeatman, E. M. ; Schmid, Ulrich ; Evans, J. | Comparison of methods for static charge energy harvesting on aircraft | Konferenzbeitrag Inproceedings | 2017 | |
3 | Ruiz-Díez, V. ; Toledo, Javier ; Hernando-Garcia, J. ; Pfusterschmied, Georg ; Schmid, Ulrich | Fluid-structure interaction modelling of the roof tile-shaped modes in piezoelectric plate microresonators | Konferenzbeitrag Inproceedings | 2017 | |
4 | Frischmuth, Tobias ; Schneider, Michael ; Grille, Thomas ; Schmid, Ulrich | FT-IR analysis of high temperature annealing effects in a-SiC:H thin films | Konferenzbeitrag Inproceedings | 2017 |