Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII

Book title Buchtitel
Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII
 
Publisher Herausgeber
SPIE
 
Series Schriftenreihe
Proceedings of SPIE - International Society for Optical Engineering
 

Publications Publikationen

Results 1-4 of 4 (Search time: 0.001 seconds).

PreviewAuthor(s)TitleTypeIssue Date
1Toledo, Javier ; Ruiz-Díez, V. ; Pfusterschmied, Georg ; Schmid, Ulrich Characterization of oscillator circuits for monitoring the density-viscosity of liquids by means of piezoelectric MEMS microresonatorsKonferenzbeitrag Inproceedings2017
2Kiziroglou, M. E. ; Becker, Thomas ; Yeatman, E. M. ; Schmid, Ulrich ; Evans, J. Comparison of methods for static charge energy harvesting on aircraftKonferenzbeitrag Inproceedings2017
3Ruiz-Díez, V. ; Toledo, Javier ; Hernando-Garcia, J. ; Pfusterschmied, Georg ; Schmid, Ulrich Fluid-structure interaction modelling of the roof tile-shaped modes in piezoelectric plate microresonatorsKonferenzbeitrag Inproceedings2017
4Frischmuth, Tobias ; Schneider, Michael ; Grille, Thomas ; Schmid, Ulrich FT-IR analysis of high temperature annealing effects in a-SiC:H thin filmsKonferenzbeitrag Inproceedings2017