Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII

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Book title Buchtitel
Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII
 
Publisher Herausgeber
SPIE
 
Series Schriftenreihe
Proceedings of SPIE - International Society for Optical Engineering
 

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Author:  Frischmuth, Tobias

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PreviewAuthor(s)TitleTypeIssue Date
1Frischmuth, Tobias ; Schneider, Michael ; Grille, Thomas ; Schmid, Ulrich FT-IR analysis of high temperature annealing effects in a-SiC:H thin filmsKonferenzbeitrag Inproceedings2017