Proceedings of the IEEJ International Workshop on Sensing, Actuation, Motion Control and Optimization (SAMCON)

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Subject: Nanopositioner

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		Preview	Author(s)	Title	Type	Issue Date
	1		Ito, Shingo ; Pirker, Stefan ; Schitter, Georg	Integrated PWM-driven motion system for high positioning resolution and low energy dissipation	Konferenzbeitrag Inproceedings	2020