Proceedings of the 10th International Conference of the European Society of Precision Engineering and Nanotechnology (EUSPEN)

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Proceedings of the 10th International Conference of the European Society of Precision Engineering and Nanotechnology (EUSPEN)
 

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Author:  van Hulzen, Jan R.

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1van Hulzen, Jan R. ; Schitter, Georg ; van Eijk, Jan ; Van den Hof, Paul M. J. Modal actuation for high-bandwidth nano-positioningKonferenzbeitrag Inproceedings2010