Proceedings of the International Conference on Microelectronic Devices and Technologies (MicDAT)

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		Preview	Author(s)	Title	Type	Issue Date
	1		Simonka, Vito ; Hössinger, Andreas ; Selberherr, Siegfried ; Weinbub, Josef	Investigation of Post-Implantation Annealing for Phosphorus-Implanted 4H-Silicon Carbide	Konferenzbeitrag Inproceedings	2018