Proceedings of the International Conference on Microelectronic Devices and Technologies (MicDAT)
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Proceedings of the International Conference on Microelectronic Devices and Technologies (MicDAT)
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| Preview | Authors / Editors | Title | Type | Issue Date | |
|---|---|---|---|---|---|
| 1 | Simonka, Vito ; Hössinger, Andreas ; Selberherr, Siegfried ; Weinbub, Josef | Investigation of Post-Implantation Annealing for Phosphorus-Implanted 4H-Silicon Carbide | Konferenzbeitrag Inproceedings  | 2018 |