22nd International Conference on Ion Implantation Technology
Book title Buchtitel
22nd International Conference on Ion Implantation Technology
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| Preview | Authors / Editors | Title | Type | Issue Date | |
|---|---|---|---|---|---|
| 1 | Current, M. ; Hobler, Gerhard ; Kawasaki, Y. ; Sugitani, M. | Channeled MeV B, P and As Profiles in Si(100): Monte-Carlo Models and SIMS | Konferenzbeitrag Inproceedings | 2018 | |
| 2 | Hobler, Gerhard ; Nordlund, K ; Current, M. ; Schustereder, Werner | Simulation Study of Al Channeling in 4H-SiC | Konferenzbeitrag Inproceedings | 2018 |