Proc. SPIE 9760, MOEMS and Miniaturized Systems XV
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Proc. SPIE 9760, MOEMS and Miniaturized Systems XV
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| Preview | Authors / Editors | Title | Type | Issue Date | |
|---|---|---|---|---|---|
| 1 | Schroedter, Richard ; Sandner, Thilo ; Janschek, Klaus ; Roth, Matthias ; Hruschka, Clemens | Real-time closed-loop control for micro mirrors with quasistatic comb drives | Konferenzbeitrag Inproceedings | 2016 |