Proc. SPIE 10116, MOEMS and Miniaturized Systems XVI
Book title Buchtitel
Proc. SPIE 10116, MOEMS and Miniaturized Systems XVI
Results 1-1 of 1 (Search time: 0.001 seconds).
Preview | Authors / Editors | Title | Type | Issue Date | |
---|---|---|---|---|---|
1 | Schroedter, Richard ; Schwarzenberg, Markus ; Dreyhaupt, Andre ; Barth, Robert ; Sandner, Thilo ; Janschek, Klaus | Microcontroller based closed-loop control of a 2D quasi-static/resonant microscanner with on-chip piezo-resistive sensor feedback | Konferenzbeitrag Inproceedings | 2017 |