MOEMS and Miniaturized Systems XIX
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MOEMS and Miniaturized Systems XIX
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| Preview | Authors / Editors | Title | Type | Issue Date | |
|---|---|---|---|---|---|
| 1 | Grahmann, Jan ; Schroedter, Richard ; Kiethe, Oliver ; Todt, Ulrich | Vibration analysis of micro mirrors for LIDAR using on-chip piezo-resistive sensor | Konferenzbeitrag Inproceedings  | 2020 |