2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)

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Publisher Herausgeber

IEEE

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		Preview	Author(s)	Title	Type	Issue Date
	1		Moll, Philipp ; Pfusterschmied, Georg ; Schneide, Michael ; Dorfmeister, Manuel ; Schmid, Ulrich	Piezoelectric Switching of Bistable MEMS Membranes in Fluids	Konferenzbeitrag Inproceedings	2021