2021 Symposium on VLSI Technology (VLSIT)
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2021 Symposium on VLSI Technology (VLSIT)
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Preview | Authors / Editors | Title | Type | Issue Date | |
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1 | Franco, J. ; Marneffe, J.-F. ; Vandooren, Anne ; Arimura, H ; Ragnarsson, L. A. ; Claes, Dieter ; Litta, Eugenio Dentoni ; Horiguchi, N. ; Croes, Kristof ; Linten, D ; Grasser, Tibor ; Kaczer, Ben | Low Temperature Atomic Hydrogen Treatment for Superior NBTI Reliability -- Demonstration and Modeling across SiO2 IL Thicknesses from 1.8 to 0.6 nm for I/O and Core Logic | Konferenzbeitrag Inproceedings | 2021 |