MME 2015 - 26th MicroMechanics Europe Workshop

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MME 2015 - 26th MicroMechanics Europe Workshop
 

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PreviewAuthor(s)TitleTypeIssue Date
1Stöber, Laura ; Konrath, J.P. ; Haberl, Veronika ; Schneider, Michael ; Schmid, Ulrich High Temperature Behaviour of Sputter Deposited Molybdenum Nitride Thin FilmsKonferenzbeitrag Inproceedings2015
2Frischmuth, Tobias ; Maurer, Daniel ; Schneider, Michael ; Grille, Thomas ; Schmid, Ulrich IMPACT OF SUBSTRATE TEMPERATURE AND INDUCTIVELY COUPLED PLASMA POWER ON a-SiC:H THIN FILM PROPERTIESKonferenzbeitrag Inproceedings2015
3Ruiz-Díez, V. ; Toledo, Javier ; Manzaneque, T. ; Hernando-Garcia, J. ; Kucera, Martin ; Schmid, Ulrich ; Sànchez-Rojas, Jose Luis Modelling And Characterization Of The Roof Tile-Shaped Modes Of Aln-Based Cantilever Resonators In Liquid MediaKonferenzbeitrag Inproceedings2015
4Toledo, Javier ; Manzaneque, T. ; Ruiz-Díez, V. ; Kucera, Martin ; Pfusterschmied, Georg ; Wistrela, Elisabeth ; Schmid, Ulrich ; Sànchez-Rojas, Jose Luis Oscillator Circuit Based On Higher-Order Out-Of-Plane Piezoelectric Resonators For Density-Viscosity Sensing Up To 0.5 Pa·sKonferenzbeitrag Inproceedings2015