Mikrosystemtechnik Kongress 2023

Event name

Event type

Event for scientific audience

Start date

23-10-2023

End date

25-10-2023

Location

Dresden

Country

Germany

Conference Track

Multi Track

Event format Veranstaltungsformat

On Site

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		Preview	Author(s)	Title	Type	Issue Date
	1		Ignat, Ioan ; Arvidsson, Elisabet ; Roos, August ; Scarano, Ermes ; Haviland, David ; Platz, Daniel ; Schmid, Ulrich	Nanosized Vacuum Gap Electromechanical Devices with Integrated Piezoelectric Actuator	Inproceedings Konferenzbeitrag	Oct-2023