2021 Symposion on VLSI Technology

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Description

Event name
2021 Symposion on VLSI Technology
 
Event type
Event for scientific audience
 
Start date
13-01-2021
End date
19-01-2021
 
Location
Kyoto
Country
Japan
 
Event format Veranstaltungsformat
On Site

Publications Publikationen

Results 1-1 of 1 (Search time: 0.002 seconds).

PreviewAuthor(s)TitleTypeIssue Date
1Franco, J. ; Marneffe, J.-F. ; Vandooren, Anne ; Arimura, H ; Ragnarsson, L. A. ; Claes, Dieter ; Litta, Eugenio Dentoni ; Horiguchi, N. ; Croes, Kristof ; Linten, D ; Grasser, Tibor ; Kaczer, Ben Low Temperature Atomic Hydrogen Treatment for Superior NBTI Reliability -- Demonstration and Modeling across SiO2 IL Thicknesses from 1.8 to 0.6 nm for I/O and Core LogicKonferenzbeitrag Inproceedings 2021