2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)

Event name
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
 
Event type
Event for scientific audience
 
Start date
21-01-2024
End date
25-01-2024
 
Location
Austin
Country
United States
 
Event format Veranstaltungsformat
On Site

Publications Publikationen

Results 1-2 of 2 (Search time: 0.002 seconds).

PreviewAuthor(s)TitleTypeIssue Date
1Moll, Philipp ; Pfusterschmied, Georg ; Schmid, Ulrich Impact of Excess Carbon at the 3C-SiC/SiO₂ Interface Using LPCVD-Based Alternating Supply DepositionInproceedings Konferenzbeitrag Feb-2024
2Huber, Dominik ; Platz, Daniel ; Gesing, André L. ; Fulmek, Paul ; Steinmüller-Nethl, Doris ; Pfusterschmied, Georg ; Schmid, Ulrich Impact of Grain Size on The Q-Factor of Poly-Crystalline Diamond Mems ResonatorsInproceedings Konferenzbeitrag 22-Feb-2024