2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)

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Description

Event name
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
 
Event type
Event for scientific audience
 
Start date
21-01-2024
End date
25-01-2024
 
Location
Austin
Country
United States
 
Event format Veranstaltungsformat
On Site

Publications Publikationen

Results 1-2 of 2 (Search time: 0.002 seconds).

PreviewAuthor(s)TitleTypeIssue Date
1Moll, Philipp ; Pfusterschmied, Georg ; Schmid, Ulrich Impact of Excess Carbon at the 3C-SiC/SiO₂ Interface Using LPCVD-Based Alternating Supply DepositionInproceedings Konferenzbeitrag Feb-2024
2Huber, Dominik ; Platz, Daniel ; Gesing, André L. ; Fulmek, Paul ; Steinmüller-Nethl, Doris ; Pfusterschmied, Georg ; Schmid, Ulrich Impact of Grain Size on The Q-Factor of Poly-Crystalline Diamond Mems ResonatorsInproceedings Konferenzbeitrag 22-Feb-2024