International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) 2025

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Description

Event name
International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) 2025
 
Event type
Event for scientific audience
 
Start date
24-09-2025
End date
26-09-2025
 
Location
Grenoble
Country
France
 
Conference Track
Multi Track
Event format Veranstaltungsformat
On Site

Publications Publikationen

Results 1-1 of 1 (Search time: 0.002 seconds).

PreviewAuthor(s)TitleTypeIssue Date
1Reiter, Tobias ; Toifl, Alexander ; Hossinger, Andreas ; Filipovic, Lado Simulation of a Polymer-Free Drie Process Using SF₆/O₂ Plasma EtchingInproceedings Konferenzbeitrag 28-Oct-2025