5th Workshop on Focused Electron Beam Induced Processing
Event name
5th Workshop on Focused Electron Beam Induced Processing
Start date
21-07-2014
End date
24-07-2014
Location
Frankfurt am Main, Deutschland
Country
Event format Veranstaltungsformat
On Site
Results 1-1 of 1 (Search time: 0.001 seconds).
| Preview | Authors / Editors | Title | Type | Issue Date | |
|---|---|---|---|---|---|
| 1 | Barth, Sven Christian ; Biegger, Felix | Volatile Precursor Species for the Growth of Semiconductors | Konferenzbeitrag Inproceedings | 2014 |