AEC/APC - 10th European Advanced Equipment Control/Advanced Process Control
Event name
AEC/APC - 10th European Advanced Equipment Control/Advanced Process Control
Start date
28-04-2010
End date
30-04-2010
Location
Catania Sizilien, Italien
Country
Event format Veranstaltungsformat
On Site
Results 1-1 of 1 (Search time: 0.001 seconds).
| Preview | Authors / Editors | Title | Type | Issue Date | |
|---|---|---|---|---|---|
| 1 | Muhr, Robert ; Schutte, Gerrit ; Vincze, Markus | 3D Geometry Measurement of Silicon Wafers based on a Deflectometric Method | Konferenzbeitrag Inproceedings | 2010 |