International Conference on Frontiers of Characterization and Metrology for Nanoelectronics (FCMN)
Event name
International Conference on Frontiers of Characterization and Metrology for Nanoelectronics (FCMN)
Start date
25-03-2013
End date
28-03-2013
Location
Gaithersburg, USA
Country
Event format Veranstaltungsformat
On Site
Results 1-1 of 1 (Search time: 0.001 seconds).
| Preview | Authors / Editors | Title | Type | Issue Date | |
|---|---|---|---|---|---|
| 1 | Schrems, Martin ; Schrank, Clemens ; Siegert, Joerg ; Kraft, J. ; Teva, Jordi ; Selberherr, Siegfried | Metrology Requirements for Manufacturing 3D Integrated ICs | Konferenzbeitrag Inproceedings | 2013 |