European Workshop on Materials for Advanced Metallization (MAM)
Event name
European Workshop on Materials for Advanced Metallization (MAM)
Start date
02-03-2014
End date
05-03-2014
Location
Chemnitz, Germany
Country
Event format Veranstaltungsformat
On Site
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| Preview | Authors / Editors | Title | Type | Issue Date | |
|---|---|---|---|---|---|
| 1 | Baer, Eberhard ; Evanschitzky, P. ; Lorenz, J. ; Roger, Frederic ; Minixhofer, R. ; Filipovic, Lado ; Orio, Roberto ; Selberherr, Siegfried | Coupled Simulation to Determine Across Wafer Variations for Electrical and Reliability Parameters of Through-Silicon VIAs | Konferenzbeitrag Inproceedings  | 2014 |