MME 2015 - 26th MicroMechanics Europe Workshop

Event name
MME 2015 - 26th MicroMechanics Europe Workshop
 
Event type
Event for scientific audience
 
Start date
20-09-2015
End date
23-09-2015
 
Location
Toledo, Spanien
Country
Europe
 
Event format Veranstaltungsformat
On Site

Publications Publikationen

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Subject:  infrared spectroscopy

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PreviewAuthor(s)TitleTypeIssue Date
1Frischmuth, Tobias ; Maurer, Daniel ; Schneider, Michael ; Grille, Thomas ; Schmid, Ulrich IMPACT OF SUBSTRATE TEMPERATURE AND INDUCTIVELY COUPLED PLASMA POWER ON a-SiC:H THIN FILM PROPERTIESKonferenzbeitrag Inproceedings2015