International Workshop on Atomic Layer Etching (ALE)
Event name
International Workshop on Atomic Layer Etching (ALE)
Start date
21-07-2019
End date
24-07-2019
Location
Bellevue, WA, USA
Country
Event format Veranstaltungsformat
On Site
Results 1-1 of 1 (Search time: 0.002 seconds).
| Preview | Authors / Editors | Title | Type | Issue Date | |
|---|---|---|---|---|---|
| 1 | Aguinsky, Luiz Felipe ; Manstetten, Paul ; Hössinger, Andreas ; Selberherr, Siegfried ; Weinbub, Josef | An Extended Knudsen Diffusion Model for Aspect Ratio Dependent Atomic Layer Etching | Konferenzbeitrag Inproceedings  | 2019 |