20th International Conference on Solid State Sensors, Actuators and Microsystems & Eurosensors XXXIII (Transducers & Eurosensors XXXIII)
Event name
20th International Conference on Solid State Sensors, Actuators and Microsystems & Eurosensors XXXIII (Transducers & Eurosensors XXXIII)
Start date
23-06-2019
End date
27-06-2019
Location
Berlin, D
Country
Event format Veranstaltungsformat
On Site
Results 1-2 of 2 (Search time: 0.001 seconds).
| Preview | Authors / Editors | Title | Type | Issue Date | |
|---|---|---|---|---|---|
| 1 | Dorfmeister, Manuel ; Schneider, Michael ; Schmid, Ulrich | A Bistable Ultrasonic Mems Device With An Integrated Piezoelectric Scandium-Aln Thin Film Actuator For Switching | Konferenzbeitrag Inproceedings | 2019 | |
| 2 | Schmid, Ulrich ; Schneider, Michael | High Performance Piezoelectric AlN MEMS Resonators for Liquid Sensing and Beyond - The Potential of PiezoMEMS | Konferenzbeitrag Inproceedings | 2019 |