19th Conference on Gettering and Defect Engineering in Semiconductor Technology (GADEST-19)

Event name
19th Conference on Gettering and Defect Engineering in Semiconductor Technology (GADEST-19)
 
Event type
Event for scientific audience
 
Start date
10-09-2022
End date
16-09-2022
 
Location
Mondsee
Country
Austria
 
Event format Veranstaltungsformat
On Site

Publications Publikationen

Filter:
Subject:  ALD

Results 1-1 of 1 (Search time: 0.001 seconds).

PreviewAuthor(s)TitleTypeIssue Date
1Nazzari, Daniele ; Solfronk, Oliver ; Sistani, Masiar ; Weber, Walter Michael Fabrication and evaluation of different passivation layers for the Ge-Insulator interface using Plasma-Enhanced ALDPresentation Vortrag13-Sep-2022