21st International Symposium on Plasma Chemistry (ISPC 21),
Event name
21st International Symposium on Plasma Chemistry (ISPC 21),
Event type
Event for scientific audience
Start date
05-08-2013
Location
Cairns/Australia
Country
Event format Veranstaltungsformat
On Site
Results 1-1 of 1 (Search time: 0.001 seconds).
Preview | Authors / Editors | Title | Type | Issue Date | |
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1 | Laimer, Johann ; Kemetmüller, Matthias ; Schoßböck, Werner ; Störi, Herbert ; Heim, Daniel ; Forsich, Christian ; Gebeshuber, I.C. ; Proschek, Michael | Utilizing bipolar pulsed dc plasma CVD for the deposition of Si-DLC coatings at moderate temperatures | Präsentation Presentation | 2013 |