UCPSS (Ultra Clean Processing of Silicon Surfaces) 2002
Event name
UCPSS (Ultra Clean Processing of Silicon Surfaces) 2002
Event type
Event for scientific audience
Start date
30-09-2002
Location
Ostende (Belgium)
Country
Austria
Event format Veranstaltungsformat
On Site
Results 1-1 of 1 (Search time: 0.002 seconds).
| Preview | Authors / Editors | Title | Type | Issue Date | |
|---|---|---|---|---|---|
| 1 | Beckhoff, B. ; Fliegauf, R. ; Ulm, G. ; Weser, J. ; Pepponi, Giancarlo ; Streli, Christina | TXRF analysis of low Z elements and TXRF-NEXAFS specification of organic contaminations on silicon wafer surfaces excited by monochromatized undulator | Präsentation Presentation | 2002 |