12th Int. Conf. on Thin Films (ICTF 12)
Event name
12th Int. Conf. on Thin Films (ICTF 12)
Event type
Event for scientific audience
Start date
15-09-2002
End date
20-09-2002
Location
Bratislava/Slovakia
Country
Austria
Event format Veranstaltungsformat
On Site
Results 1-1 of 1 (Search time: 0.001 seconds).
| Preview | Authors / Editors | Title | Type | Issue Date | |
|---|---|---|---|---|---|
| 1 | Fink, Markus ; Laimer, Johann ; Störi, Herbert | How to improve the uniformity of deposition conditions in large pulsed d.c. PACVD reactors | Präsentation Presentation | 2002 |