8th Int. Conf. on Plasma Surface Engineering (PSE)
Event name
8th Int. Conf. on Plasma Surface Engineering (PSE)
Event type
Event for scientific audience
Start date
09-09-2002
End date
13-09-2002
Location
Garmisch-Partenkirchen/D
Country
Austria
Event format Veranstaltungsformat
On Site
Results 1-2 of 2 (Search time: 0.002 seconds).
Preview | Authors / Editors | Title | Type | Issue Date | |
---|---|---|---|---|---|
1 | Laimer, Johann ; Störi, Herbert ; Misslinger, G. | Diamond deposition with chlorinated methanes: Investigation of the plasma chemistry | Präsentation Presentation | 2002 | |
2 | Laimer, Johann ; Störi, Herbert ; Beer, T.A. ; Fink, Markus | Influence of bipolar voltage pulses on the uniformity of pulsed d.c. discharges used for PACVD | Präsentation Presentation | 2002 |