Int. Conf. on Characterization and Metrology for ULSI Technology

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Description

Event name
Int. Conf. on Characterization and Metrology for ULSI Technology
 
Event type
Event for scientific audience
 
Start date
15-03-2005
Location
Richardson, TX/USA
Country
Austria
 
Event format Veranstaltungsformat
On Site

Publications Publikationen


Results 1-1 of 1 (Search time: 0.002 seconds).

PreviewAuthors / EditorsTitleTypeIssue Date
1Werner, Wolfgang S.M. ; Smekal, Werner ; Powell, C.J. A New NIST Database for the Simulation of Electron Spectra for Surface Analysis (SESSA): Application to Angle-Resolved X-ray Photoelectron Spectroscopy of HfO₂, ZrO₂, HfSiO₄, and ZrSiO₄ Films on SiliconPräsentation Presentation2005