AVS Symposium
Event name
AVS Symposium
Event type
Event for scientific audience
Start date
31-10-2005
Location
Boston
Country
Event format Veranstaltungsformat
On Site
Results 1-1 of 1 (Search time: 0.002 seconds).
Preview | Authors / Editors | Title | Type | Issue Date | |
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1 | Werner, Wolfgang S.M. ; Smekal, Werner ; Powell, C.J. | Measurement of Thicknesses of HfO₂, HfSiO₄, ZrO₂, and ZrSiO₄ Films on Silicon by Angle-Resolved XPS | Präsentation Presentation | 2005 |