American Vacuum Symposium 2006
Event name
American Vacuum Symposium 2006
Event type
Event for scientific audience
Start date
15-11-2006
Location
San Francisco/USA
Country
Event format Veranstaltungsformat
On Site
Results 1-1 of 1 (Search time: 0.004 seconds).
| Preview | Authors / Editors | Title | Type | Issue Date | |
|---|---|---|---|---|---|
| 1 | Werner, Wolfgang S.M. ; Tomastik, Christian ; Smekal, Werner ; Moon, D.W. ; Kim, K.J. ; Powell, C.J. | Film thickness determination of ultra thin HfO₂ dielectrics with angle resolved XPS: Experimental electron scattering data | Präsentation Presentation | 2006 |