International Workshop on INSIGHT in Semiconductor Device Fabriaction, Metrology, and Modeling (INSIGHT-2009)

View Statistics Email Alert RSS Feed

Description

Event name
International Workshop on INSIGHT in Semiconductor Device Fabriaction, Metrology, and Modeling (INSIGHT-2009)
 
Event type
Event for scientific audience
 
Start date
26-04-2009
End date
29-04-2009
 
Location
Napa, CA
Country
 
Event format Veranstaltungsformat
On Site

Publications Publikationen

Results 1-2 of 2 (Search time: 0.002 seconds).

PreviewAuthors / EditorsTitleTypeIssue Date
1Giubertoni, D. ; Pepponi, Giancarlo ; Sahiner, M.A. ; Kelty, S.P. ; Kah, M. ; Kirkby, K.J. ; Meirer, F. ; Gennaro, S. ; Doherty, R. ; Foad, M.A. ; Woicik, J.C. ; Streli, Christina ; Bersani, M. ; Pianetta, P. Deactivation of sub-melt laser annealed arsenic ultra shallow junctions in silicon during subsequent thermal treatmentPräsentation Presentation2009
2Pepponi, Giancarlo ; Meirer, F. ; Giubertoni, D. ; Ingerle, D. ; Steinhauser, Georg ; Streli, Christina ; Hoenicke, P. ; Beckhoff, B. ; Bersani, M. Grazing Incidence x-ray fluorescence and secondary ion mass spectrometry combined approach for characterization of ultra shallow arsenic distribution in siliconPräsentation Presentation2009