International Workshop on INSIGHT in Semiconductor Device Fabriaction, Metrology, and Modeling (INSIGHT-2009)
Event name
International Workshop on INSIGHT in Semiconductor Device Fabriaction, Metrology, and Modeling (INSIGHT-2009)
Event type
Event for scientific audience
Start date
26-04-2009
End date
29-04-2009
Location
Napa, CA
Country
Event format Veranstaltungsformat
On Site
Results 1-2 of 2 (Search time: 0.002 seconds).
| Preview | Authors / Editors | Title | Type | Issue Date | |
|---|---|---|---|---|---|
| 1 | Giubertoni, D. ; Pepponi, Giancarlo ; Sahiner, M.A. ; Kelty, S.P. ; Kah, M. ; Kirkby, K.J. ; Meirer, F. ; Gennaro, S. ; Doherty, R. ; Foad, M.A. ; Woicik, J.C. ; Streli, Christina ; Bersani, M. ; Pianetta, P. | Deactivation of sub-melt laser annealed arsenic ultra shallow junctions in silicon during subsequent thermal treatment | Präsentation Presentation | 2009 | |
| 2 | Pepponi, Giancarlo ; Meirer, F. ; Giubertoni, D. ; Ingerle, D. ; Steinhauser, Georg ; Streli, Christina ; Hoenicke, P. ; Beckhoff, B. ; Bersani, M. | Grazing Incidence x-ray fluorescence and secondary ion mass spectrometry combined approach for characterization of ultra shallow arsenic distribution in silicon | Präsentation Presentation | 2009 |