Frontiers of Characterization and Metrology for Nanoelectronics
Event name
Frontiers of Characterization and Metrology for Nanoelectronics
Event type
Event for scientific audience
Start date
11-05-2009
End date
15-05-2009
Location
College of Nanoscale Science and Engineering, University at Albany, Albany, NY
Country
Event format Veranstaltungsformat
On Site
Results 1-1 of 1 (Search time: 0.002 seconds).
| Preview | Authors / Editors | Title | Type | Issue Date | |
|---|---|---|---|---|---|
| 1 | Giubertoni, D. ; Pepponi, Giancarlo ; Beckhoff, B. ; Hoenicke, P. ; Gennaro, S. ; Meirer, F. ; Ingerle, D. ; Steinhauser, Georg ; Fried, M. ; Petrik, P. ; Parisini, A. ; Reading, M.A. ; Streli, Christina ; van den Berg, J.A. ; Bersani, M. | Multi-technique characterization of arsenic ultra shallow junctions in silicon within the ANNA consortium | Präsentation Presentation | 2009 |