Journal of Computational Electronics

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Journal description

Title Titel
Journal of Computational Electronics
 
e-ISSN
1572-8137
 
ISSN
1569-8025
 
Publisher Herausgeber
SPRINGER
 

Publications Publikationen

Filter:
Subject:  Feature-scale

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PreviewAuthor(s)TitleTypeIssue Date
1Souza Berti Rodrigues-2023-Journal of Computational Electronics-vor.pdf.jpgSouza Berti Rodrigues, Francio ; Aguinsky, Luiz Felipe ; Lenz, Christoph ; Hössinger, Andreas ; Weinbub, Josef 3D modeling of feature-scale fluorocarbon plasma etching in silicaArticle Artikel Oct-2023