Journal of Microelectromechanical Systems

Title Titel
Journal of Microelectromechanical Systems
Publisher Herausgeber

Publications Publikationen

Results 1-9 of 9 (Search time: 0.003 seconds).

PreviewAuthors / EditorsTitleTypeIssue Date
1Yoo, Han Woong ; Albert, Stephan ; Schitter, Georg Accurate Analytic Model of a Parametrically Driven Resonant MEMS Mirror with a Fourier Series Based Torque ApproximationArtikel Article2020
2Schneider, Michael ; Dorfmeister, Manuel ; Moll, Philipp ; Kaltenbacher, Manfred ; Schmid, Ulrich Bi-Stable Aluminum Nitride-Based Piezoelectric Micromachined Ultrasonic Transducer (PMUT)Artikel Article2020
3Moll-2022-Journal of Microelectromechanical Systems-vor.pdf.jpgMoll, Philipp ; Pfusterschmied, Georg ; Schneider, Michael ; Dorfmeister, Manuel ; Knafl, Sebastian ; Wanzenböck, Heinz ; Schmid, Ulrich Biocompatible a-SiC:H-Based Bistable MEMS Membranes With Piezoelectric Switching Capability in FluidsArticle Artikel Jun-2022
4Schroedter, Richard ; Yoo, Han Woong ; Brunner, David ; Schitter, Georg Charge-Based Capacitive Self-Sensing With Continuous State Observation for Resonant Electrostatic MEMS MirrorsArtikel Article2021
5Lahlalia, Ayoub ; Le Neel, Olivier ; Shankar, Ravi ; Kam, Shian Yeu ; Filipovic, Lado Electro-Thermal Simulation & Characterization of a Microheater for SMO Gas SensorsArtikel Article2018
6Camarda, Antonio ; Sordo, Guido ; Iannacci, Jacopo ; Schneider, Michael ; Schmid, Ulrich ; Tartagni, Marco ; Romani, Aldo Fabrication and Electromechanical Modelling of a Flexural-Mode MEMS Piezoelectric Transformer in AlNArtikel Article2017
7Yoo, Han Woong ; Albert, Stephan ; Schitter, Georg Fourier Series based Analytic Model of a Resonant MEMS Mirror for General Voltage InputsArtikel Article2021
8Colon-Berrios, Aida R. ; McGinn, Christine K. ; Cavallari, Marco R. ; Bahamonde, Jose A. ; Yelavik, Natallia ; Mikula, Hannes ; Bintinger, Johannes ; Kymissis, Ioannis Improved Cyclohexanone Vapor Detection via Gravimetric SensingArtikel Article2020
9Mayrhofer, Patrick ; Rehlendt, Christopher ; Fischeneder, Martin ; Kucera, Martin ; Wistrela, Elisabeth ; Bittner, Achim ; Schmid, Ulrich ScAlN MEMS Cantilevers for Vibrational Energy Harvesting PurposesArtikel Article2017