Journal of Microelectromechanical Systems

Title Titel

e-ISSN

1941-0158

ISSN

1057-7157

Publisher Herausgeber

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC

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Subject: Mechanical Engineering

Subject: switched current integrator

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		Preview	Author(s)	Title	Type	Issue Date
	1		Schroedter, Richard ; Yoo, Han Woong ; Brunner, David ; Schitter, Georg	Charge-Based Capacitive Self-Sensing With Continuous State Observation for Resonant Electrostatic MEMS Mirrors	Artikel Article	2021