Journal of Micromechanics and Microengineering

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e-ISSN

1361-6439

ISSN

0960-1317

Publisher Herausgeber

IOP PUBLISHING LTD

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Author: Seidel, H

Author: Peiner, E

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		Preview	Author(s)	Title	Type	Issue Date
	1		Sökmen, Ü ; Stranz, A ; Waag, A ; Ababneh, A ; Seidel, H ; Schmid, U ; Peiner, E	Evaluation of resonating Si cantilevers sputter-deposited with AlN piezoelectric thin films for mass sensing applications	Artikel Article	2010