Journal of Micromechanics and Microengineering

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Journal description

Title Titel
Journal of Micromechanics and Microengineering
 
e-ISSN
1361-6439
 
ISSN
0960-1317
 
Publisher Herausgeber
IOP PUBLISHING LTD
 

Publications Publikationen

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Author:  Schmid, Ulrich
Access Type:  Open Access

Results 1-2 of 2 (Search time: 0.002 seconds).

PreviewAuthor(s)TitleTypeIssue Date
1Patocka F - 2019 - Position-dependent mass responsivity of silicon MEMS...pdf.jpgPatocka, F. ; Schneider, M. ; Dörr, N. ; Schneidhofer, C. ; Schmid, U. Position-dependent mass responsivity of silicon MEMS cantilevers excited in the fundamental, two-dimensional roof tile-shaped modeArticle Artikel 2019
2Dorfmeister Manuel - 2019 - Switching performance of bistable membranes...pdf.jpgDorfmeister, Manuel ; Kössl, Bernhard ; Schneider, Michael ; Pfusterschmied, Georg ; Schmid, Ulrich Switching performance of bistable membranes activated with integrated piezoelectric thin film transducersArticle Artikel Oct-2019