Journal of Micromechanics and Microengineering

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e-ISSN

1361-6439

ISSN

0960-1317

Publisher Herausgeber

IOP PUBLISHING LTD

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Author: Keplinger, Franz

Author: Klug, Patrick

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		Preview	Author(s)	Title	Type	Issue Date
	1		Dabsch, Alexander ; Rosenberg, Christoph ; Klug, Patrick ; Stifter, Michael ; Keplinger, Franz	Multiaxial resonant MEMS force sensor	Artikel Article	2018