Journal of Micromechanics and Microengineering

Title Titel

e-ISSN

1361-6439

ISSN

0960-1317

Publisher Herausgeber

IOP PUBLISHING LTD

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Subject: MEMS

Subject: Electronic, Optical and Magnetic Materials

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		Preview	Author(s)	Title	Type	Issue Date
	1		Ruiz-Díez, V ; Hernando-García, J ; Toledo, J ; Manzaneque, T ; Kucera, M ; Pfusterschmied, G ; Schmid, U ; Sánchez-Rojas, J L	Modelling and Characterization of the Roof tile-shaped Modes of AlN-based Cantilever Resonators in Liquid Media	Artikel Article	2016