Journal of Micromechanics and Microengineering

Title Titel

e-ISSN

1361-6439

ISSN

0960-1317

Publisher Herausgeber

IOP PUBLISHING LTD

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Subject: MEMS

Subject: mass responsivity

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		Preview	Author(s)	Title	Type	Issue Date
	1		Patocka, F. ; Schneider, M. ; Dörr, N. ; Schneidhofer, C. ; Schmid, U.	Position-dependent mass responsivity of silicon MEMS cantilevers excited in the fundamental, two-dimensional roof tile-shaped mode	Article Artikel	2019