JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

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Journal description

Title Titel
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
 
e-ISSN
2166-2754
 
ISSN
2166-2746
 
Publisher Herausgeber
A V S AMER INST PHYSICS
 
Publisher's Address Herausgeber Adresse
STE 1 NO 1, 2 HUNTINGTON QUADRANGLE, MELVILLE, USA, NY, 11747-4502
 
Listed in SCI Aufgelistet im SCI
 
Peer reviewed Begutachtet
 
 

Publications Publikationen


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Author:  Strasser, Gottfried
Author:  Golka, Sebastian

Results 1-1 of 1 (Search time: 0.002 seconds).

PreviewAuthor(s)TitleTypeIssue Date
1Golka, Sebastian ; Schartner, Stefan ; Schrenk, Werner ; Strasser, Gottfried Low bias reactive ion etching of GaAs with a SiCl₄/N₂/O₂ time-multiplexed processArtikel Article2007