MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS

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Journal description

Title Titel
MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS
 
e-ISSN
1873-4944
 
ISSN
0921-5107
 
Publisher Herausgeber
ELSEVIER
 
Publisher's Address Herausgeber Adresse
RADARWEG 29, AMSTERDAM, Netherlands, 1043 NX
 
Listed in SCI Aufgelistet im SCI
 
Peer reviewed Begutachtet
 
 

Publications Publikationen

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Subject:  Aluminium nitride Sputter deposition technique XRD pattern c-Axis orientation Biaxial film stress Piezoelectric coefficients Interferometric measurements

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PreviewAuthor(s)TitleTypeIssue Date
1Ababneh, A. ; Schmid, U. ; Hernando, J. ; Sánchez-Rojas, J.L. ; Seidel, H. The influence of sputter deposition parameters on piezoelectric and mechanical properties of AlN thin filmsArtikel Article2010