Thin Solid Films

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Journal description

Title Titel
Thin Solid Films
 
e-ISSN
1879-2731
 
ISSN
0040-6090
 
Publisher Herausgeber
ELSEVIER SCIENCE SA
 
Publisher's Address Herausgeber Adresse
PO BOX 564, LAUSANNE, SWITZERLAND, 1001
 
Listed in SCI Aufgelistet im SCI
 
Peer reviewed Begutachtet
 
 

Publications Publikationen

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Date Issued:  [2000 TO 2024]
Author:  Schmid, Ulrich
Author:  Schneider, Michael
Subject:  Hydrogenated amorphous silicon carbide (a-SiC:H) Annealing Mass effusion Fourier transforminfrared spectroscopy (FT-IR) Young's modulus Hardness Residual stress Microstructure

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PreviewAuthor(s)TitleTypeIssue Date
1Frischmuth, Tobias ; Schneider, Michael ; Maurer, Daniel ; Grille, Thomas ; Schmid, Ulrich High temperature annealing effects on the chemical and mechanical properties of inductively-coupled plasma-enhanced chemical vapor deposited a-SiC:H thin filmsArtikel Article 2016