Implantation of metals in thin SiO2 and SiOx layers for modification of the barrier properties for mobile ions

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Primary Data

Project Acronym Projekt Kurzbezeichnung
Mobile Ionen
 
Project Title (de) Projekttitel (de)
Implantation of metals in thin SiO2 and SiOx layers for modification of the barrier properties for mobile ions
 
Consortium Coordinator Koordinator des Konsortiums
Principal Investigator Projektleiter_in
 
Status
IN PROGRESS