Simulations of liquid film flows with free surface on rotating silicon wafers

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Primary Data

Project Acronym Projekt Kurzbezeichnung
RoWaFlowSim
 
Project Title (de) Projekttitel (de)
Simulations of liquid film flows with free surface on rotating silicon wafers
 
Consortium Coordinator Koordinator des Konsortiums
Principal Investigator Projektleiter_in
 
Status
CLOSED