High-performance polycrystalline materials for the next generation of MEMS timing devices

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Primary Data

Project Acronym Projekt Kurzbezeichnung
RESONANCE
 
Project Title (de) Projekttitel (de)
High-performance polycrystalline materials for the next generation of MEMS timing devices
 
Consortium Coordinator Koordinator des Konsortiums
 
Principal Investigator Projektleiter_in
 

Grants

Funder/Funding Agency Fördergeber
FFG - Österr. Forschungsförderungs- gesellschaft mbH
Grant number Förderkennnummer
888041
 

Publications

Results 1-4 of 4 (Search time: 0.003 seconds).

PreviewAuthor(s)TitleTypeIssue Date
1Huber-2026-SENSORS AND ACTUATORS A-PHYSICAL-vor.pdf.jpgHuber, Dominik ; Gesing, Andre ; Pfusterschmied, Georg ; Platz, Daniel ; Schmid, Ulrich Design-dependent Q-factor spectroscopy: Impact of surface oxidation on dissipation in 2 micrometer thick MEMS resonatorsArticle Artikel 1-Mar-2026
2Huber-2026-Journal of Applied Physics-vor.pdf.jpgHuber, D. ; Stöger-Pollach, M. ; Gülly, M. ; Schallert, C. ; Steinmüller-Nethl, D. ; Pfusterschmied, G. ; Schmid, U. Quality factor enhancement in polycrystalline diamond MEMS resonators by post-deposition plasma treatmentArticle Artikel 28-Jan-2026
3Huber-2026-Journal of Sensors and Sensor Systems-vor.pdf.jpgHuber, Dominik ; Schallert, Christoph ; Loch Gesing, André ; Steinmüller-Nethl, Doris ; Pfusterschmied, Georg ; Schmid, Ulrich Automated contactless characterization of local thin film thickness and film stress with standard MEMS structures at wafer levelArticle Artikel 8-Jan-2026
4Huber-2025-Journal of Sensors and Sensor Systems-vor.pdf.jpgHuber, Dominik ; Schneider, Michael ; Fulmek, Paul ; Pfusterschmied, Georg ; Schmid, Ulrich Tailored measurement setup for the contactless characterization of MEMS resonators at the wafer levelArticle Artikel 27-May-2025