Pippan, Reinhard

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Pippan, Reinhard
 
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Contributing Publications Mitbeteiligte Publikationen

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Subject:  Silicondioxid/Wafer Curvature/thermomechanical/temperature behaviour/crack formation/amorphous/thin film/semiconductors/stresses

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PreviewAuthor(s)TitleTypeIssue Date
1Bigl Stephan Paul - 2013 - The influence of Hydrogen and Nitrogen impurities on...pdf.jpgBigl, Stephan Paul The influence of Hydrogen and Nitrogen impurities on the annealing behaviour of undoped silicon glassThesis Hochschulschrift 2013