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Stoeger-Pollach, M.

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		Preview	Author(s)	Title	Type	Issue Date
	1		Bethge, O. ; Henkel, Christoph ; Abermann, S. ; Pozzovivo, G. ; Stoeger-Pollach, M. ; Werner, W.S.M. ; Smoliner, J. ; Bertagnolli, E.	Stability of La₂O₃ and GeO₂ passivated Ge surfaces during ALD of ZrO₂ high-k dielectric	Artikel Article	2012